Data XRD dari nanokomposit Ti-Si-N telah dianalisis menggunakan program GSAS berbasis metode Rietveld untuk mengidentifikasa fasa-fasa pembentuk serta komposisinya dan mencari pengaruhnya terhadap kekerasan material tersebut. Telah ditemukan fasa-fasa baru dalam sampel tersebut, disamping fasa-fasa nanokomposit nc-TiN/a-Si3N4 & a-/nc-TiSi2 yang telah banyak dikenal. Dari fasa-fasa kristal yang diperoleh, setelah dilakukan perhitungan fraksi fasa amorf Si3N4 dan TiSi2 maka diperoleh bahwa kekerasan optimal terjadi pada kandungan a-Si3N4 8 wt.%.

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Phase composition analysis using rietveld methode and it?s influence to the hardness of Ti-Si-N nanocomposites. XRD data of nanocomposites Ti-Si-N have been analysed using GSAS based on Rietveld Method in order to identify phases and their composition as well as its influence on the hardness of these nanocomposites. Several new phases have been found in the sample beside the nc-TiN/a-Si3N4& a-/nc-TiSi2 that have been known widely. From the obtained crystalline phase, after the calculation of amorf Si3N4 and TiSi2 phase fraction, it is found that the optimum hardness can be reached when the fraction of a-Si3N4 phase around 8 wt.%.