Film nanokristalin TiO2 telah berhasil dibuat dengan metode sol-gel bersuhu rendah yang dikombinasikan dengan penambahan aditif TBA(OH) dan mendapatkan perlakuan ultrasonikasi atau microwave. Sejumlah uji kinerja, seperti uji sifat anti kabut, uji degradasi senyawa organik, transparansi, dan uji kekuatan daya lekat film, dilakukan pada film yang dihasilkan. Film dengan perlakuan ultrasonikasi dan microwave terbukti mampu bersifat super hidrofilik (0o) dan memiliki aktivitas fotokatalisis yang mampu bersaing dengan film TiO2 Degussa P-25. Karakterisasi katalis dilakukan dengan XRD, FTIR, dan SEM-EDS. Hasil uji XRD menunjukkan ultrasonikasi dan microwave mampu mendorong kristalisasi TiO2, sementara hasil uji FTIR menunjukkan bahwa gugus hidroksil yang teradsorp berperan di balik sifat super hidrofilik film.
Nanocrystalline TiO2 thin films have been successfully made by low temperature sol-gel method which is combined with TBA(OH) additive and ultrasonic or microwave treatment. Several tests have been conducted to investigate hydrophilic, photocatalytic activity, transparency, and mechanical resistance property. Ultrasonic treatment and microwave treatment TiO2 thin films are super hydrophilic and have good photocatalytic property relatively compared with Degussa P-25. Characterization were done by XRD, FTIR, and SEM-EDS. XRD pattern showed that ultrasonic and microwave are able to enhance crystallization of TiO2, while infra red spectra proved that hydroxyl groups adsorbed have significant role to improve hydrophilic property of films.