Aplikasi mikrokantilever sebagai biosensor mulai banyak dipelajari dalam dunia
kesehatan, biologi, kimia dan lingkungan hidup. Pada riset ini dilakukan
perancangan biosensor dengan menggunakan piezoresistive mikrokantilever.
Aktivitas riset meliputi pembuatan rangkaian wheatstone bridge sebagai detektor
obyek, simulasi perubahan frekuensi resonansi berbasis Persamaan Euler-
Bernoulli Beam sebagai deteksi keberadaan obyek, dan simulasi gerak
mikrokantilever dengan menggunakan software COMSOL Multiphysics 3.5. Jenis
piezoresistive mikrokantilever yang digunakan adalah seri NPX1CTP004 SII
Nanotechnology dengan panjang 110 µm, lebar 50 µm, dan tebal 1 µm. Massa
mikrokantilever adalah 12,815 nanogram (sudah termasuk massa receptor-nya).
Contoh obyek yang dideteksi adalah bakteri, dimana massa untuk satu bakteri
diasumsikan 0,3 picogram. Saat terdeteksi, satu massa obyek bakteri akan
menyebabkan nilai defleksi sebesar 3,05355x10-11 m dan nilai frekuensi resonansi
sebesar 118,90 kHz, sedangkan untuk empat obyek bakteri akan menyebabkan
nilai defleksi sebesar 3,05445x10-11 m dan nilai frekuensi resonansi sebesar
118,68 kHz. Dari data tersebut terlihat bahwa bertambahnya massa bakteri akan
menyebabkan naiknya nilai defleksi dan turunnya nilai frekuensi resonansi.
AbstractDiverse applications of microcantilevers in the field of sensors have been explored
by many researchers, such as in medicine, biological, chemistry, and
environmental monitoring. This research designs a biosensor using piezoresistive
microcantilever. The activities consist of designing Wheatstone bridge circuit as
object detector, simulation of resonance frequency shift based on Euler Bernoulli
Beam equation, and deflection simulation using COMSOL Multiphysics 3.5
software program. The piezoresistive microcantilever type is NPX1CTP004 SII
Nanotechnology series with length 110 µm, 50 µm width, and thickness of 1 µm.
Microcantilever mass is 12.815 nanograms (include the mass receptor). The
sample of object in this research is bacteria. One bacteria mass is assumed to 0.3
picograms. When detected, the mass of one bacterium will cause deflection of
3,05355x10-11 m and resonance frequency value of 118,90 kHz. Besides, for the
mass of four bacterium will cause deflection of 3,05445x10-11 m and resonance
frequency value of 118,68 kHz. From these data show that increasing the mass of
bacteria will increasing the deflection value and reducing the value of resonance
frequency.;Diverse applications of microcantilevers in the field of sensors have been explored
by many researchers, such as in medicine, biological, chemistry, and
environmental monitoring. This research designs a biosensor using piezoresistive
microcantilever. The activities consist of designing Wheatstone bridge circuit as
object detector, simulation of resonance frequency shift based on Euler Bernoulli
Beam equation, and deflection simulation using COMSOL Multiphysics 3.5
software program. The piezoresistive microcantilever type is NPX1CTP004 SII
Nanotechnology series with length 110 µm, 50 µm width, and thickness of 1 µm.
Microcantilever mass is 12.815 nanograms (include the mass receptor). The
sample of object in this research is bacteria. One bacteria mass is assumed to 0.3
picograms. When detected, the mass of one bacterium will cause deflection of
3,05355x10-11 m and resonance frequency value of 118,90 kHz. Besides, for the
mass of four bacterium will cause deflection of 3,05445x10-11 m and resonance
frequency value of 118,68 kHz. From these data show that increasing the mass of
bacteria will increasing the deflection value and reducing the value of resonance
frequency.
