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Nanofabrication : techniques and principles

edited by Maria Stepanova, Steven Dew (Springer, 2012)

 Abstrak

The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

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 Metadata

Jenis Koleksi : eBooks
No. Panggil : e20405946
Entri tambahan-Nama orang :
Subjek :
Penerbitan : Wien: Springer, 2012
Sumber Pengatalogan: LibUI eng rda
Tipe Konten: text
Tipe Media: computer
Tipe Pembawa: online resource
Deskripsi Fisik:
Tautan: http://link.springer.com/book/10.1007%2F978-3-7091-0424-8
Lembaga Pemilik:
Lokasi:
  • Ketersediaan
  • Ulasan
  • Sampul
No. Panggil No. Barkod Ketersediaan
e20405946 02-19-130278820 TERSEDIA
Ulasan:
Tidak ada ulasan pada koleksi ini: 20405946
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