[Lapisan Barium Zirkonnium Titanate akan disintesis menggunakan metodeChemical Solution Deposition kemudian dilanjutkan dengan proses Spin Coating.Pada tahap pertama, material lapisan Barium Zirkonium Titanate akan diberikanvariasi perlakuan temperatur, yaitu 150oC, 400oC, 650oC dan 750oC. Kemudianpada tahap kedua, material lapisan Barium Zirkonium Titanate akan didopingdengan ion Alumunium sebanyak 1% dan 3% pada posisi ion Titanium.Berdasarkan pengujian XRD, terlihat puncak intensitas Barium ZirkoniumTitanate bertambah seiring bertambah besar perlakuan panas. Pada lapisan BariumZirkonium Aluminum Titanate, puncak intensitas bergeser ketika doping ionAluminum dilakukan. Lapisan Barium Zirkonium Titanate dan Barium ZirkoniumAluminum Titanate memiliki struktur kristal kubik perovskite.Kata, Barium Zirkonium Titanate Film was synthesized using sol-gel method, followedby Spin coating method. Stage 1, Barium Zirkonium Titanate film was givenvarious heat treatment 150oC, 400oC, 650oC, and 750oC. Stage 2, BariumZirkonium Titanate film was doped by Aluminum ion with the content 1% and3% to Titanium ion site. Peak intensity was observed in XRD pattern. Theincrease of intensity related with the increase of temperature. Along with thedoping of Aluminum ion in BZT, the peak shifting were observed in som XDpattern. Barium Zirkonium Titanate and Barium Zirkonium Aluminum Titanatefilm had crystal structure of Cubic perovskite.]