ABSTRAK
Antimony (Sb) doped tin oxide (ATO) merupakan salah satu material transparan yang telah mendapatkan popularitas lebih akhir-akhir ini karena sangat berperan penting terhadap teknologi. transparansi tinggi pada cahaya tampak, konsentrasi dan mobilitas elektron tinggi membuat ATO sebagai bahan penting untuk oksida transparan konduktif, display flat-panel, sel surya, jendela arsitektur perangkat optoelektronik dan sensor gas. Dalam penelitian ini, lapisan tipis antimony doped-tin oxide (ATO) dibuat dengan biaya rendah dan sederhana menggunakan metode ultrasonic spray pyrolysis. Lapisan tipis ATO telah ditumbuhkan dengan menvariasikan konsentrasi doping antimon (0%, 1%, 2%, 3% Sb) dan waktu deposisi (10, 20, 30 menit). Sifat struktural, morfologi, optik dan listrik dari lapisan ini telah dianalisis dengan difraksi sinar-X, mikroskop elektron, UV-VIS dan instrumen four point probe. Analisis XRD menunjukkan bahwa semua lapisan polikristalin dengan struktur kristal tetragonal. Analisis sifat optik dan listrik menunjukkan bahwa konsentrasi optimum doping Sb telah diperoleh untuk meningkatkan transparansi danmeningkatkan konduktivitas listrik lapisan tipis timah oksida

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ABSTRACT
Antimony (Sb) doped tin oxide (ATO) is one transparent material that has gained its popularity more recently due to their great technological importance. High transparency in the visible light, high concentration and mobility of electron makes ATO as an important material for the field of transparent conducting oxide, flat-panel display, solar cell, architectural windows optoelectronic devices and gas sensor. In this study, Sb doped-tin oxide (ATO) thin films has been fabricated by low cost and simple, ultrasonic spray pyrolysis method. ATO thin films have been deposited with various antimony doping concentrations (0%, 1%, 2%, 3% Sb) and time deposition(10, 20, 30 minutes). The structural, morphological, optical and electrical properties of these films have been analyzed by X-ray diffraction, scanning electron microscopy, UV-VIS and four point probe instruments. XRD studies show that all films are polycrystalline with tetragonal crystal structure. The optic and electric properties studies show that the concentration optimum of Sb doping has been obtained to increase transparency and improve the electrical conductivity of tin oxide thin film.