Penelitian ini bertujuan untuk mensintesa dan mengoptimasi
thick film BaFe
12O
19 fasa tunggal,
thick film BaTiO
3 fasa tunggal dan material multilayer BaTiO
3/ BaFe
12O
19 dengan metode
Sol-Gel/Spin Coating. Karakterisasi dilakukan untuk mengetahui sifat ferromagnetik dan ferroelektrik. Deposisi material multilayer dilakukan pada substrat
single crystal Si (100) menggunakan
spin coater.
Thick film BaFe
12O
19 fasa tunggal berhasil disintesa dengan parameter optimum jumlah lapisan 9 lapis, kecepatan putaran 3000 rpm, temperature
annealing 1000
0C selama 3 jam, dan rasio molar Ba: Fe = 1 : 8. Hasil karakterisasi SEM menunjukkan bahwa material multilayer BaFe
12O
19 memiliki distribusi ukuran dan bentuk partikel yang homogen, dengan ukuran partikel berkisar antara 100-150 nm dan tebal sekitar 2,9 µm. Hasil uji VSM pada material multilayer BaFe
12O
19 menunjukkan nilai koersivitas pada arah parallel dan
perpendicular yang hampir sama yaitu 2,5 kOe.
Thick film BaTiO
3 fasa tunggal berhasil dideposisikan dengan kondisi proses optimum yaitu, temperatur
annealing 800
0C selama 4 jam dan kecepatan putaran 4000 rpm.
Film BaTiO
3 dengan jumlah lapisan 5 lapis mempunyai ketebalan 2,6-3,2 µm. Material multilayer BaTiO
3/ BaFe
12O
19 berhasil dideposisikan pada substrat Si dengan metode
sol-gel/spin coating serta menunjukkan sifat ferromagnetik dan ferroelektrik. Nilai magnetik Saturasi, Remanen, dan medan koersif pada material multilayer BaTiO
3/ BaFe
12O
19 yaitu 2,7 memu, 1,3 memu dan 1,7 kOe. Sedangkan kurva histerisis elektrik menunjukkan nilai polarisasi spontan (P
s), polarisasi remanen (P
r) dan medan Coersive (E
c) berturut-turut 5,4 mC/cm
2, 6,2 mC/cm
2 dan 1 kV/cm.
In this research, single phase thick film BaFe
12O
19, BaTiO
3 and BaTiO
3/ BaFe
12O
19 multilayer had been synthesized by sol gel/spin coating method. Ferroelectric and ferromagnetic properties were observed. Multilayer materials was deposited on single crystal substrate Si (100) using a spin coater. Single phase thick film BaFe
12O
19 was synthesized with optimum parameters of 9 layers, 3000 rpm rotation speed, 1000
0C annealing temperature for 3 hours, and molar ratio Ba:Fe = 1: 8. The characteristic SEM images indicate that the multilayer BaFe
12O
19 material has a homogeneous size and shape distribution of particles, with crystallite size 100-150 nm. The magnetic hysteresis loops for single phase thick film BaFe
12O
19 showed that perpendicular and in-plane coercivity had the same value of 2,5 kOe. Single phase thick film BaTiO
3 was successfully deposited with optimum process conditions which were annealing temperature at 800
0C for 4 hours and rotation speed 4000 rpm. The BaTiO
3 film with 5 layers has a thickness of 2.6-3.2 µm. BaTiO
3/ BaFe
12O
19 multilayer material was successfully deposited on the Si substrate with the sol-gel/spin coating method and showed ferromagnetic and ferroelectric properties. The saturation magnetization (Ms), remanent magnetization (Mr), and coercivity of BaTiO
3/ BaFe
12O
19 multilayer material are 2.7 memu, 1.3 memu and 1.7 kOe. From ferroelectric hysteresis loop it can be inferred that the values of remanent polarization (Pr), spontaneous polarization (Ps) and coercive field (Ec) are ,4 mC/cm
2, 6.2 mC/cm
2 and 1kV/cm, respectively.