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Micro and Nano Fabrication

Gatzen, Hans H; Saile, Volker; Leuthold, Jürg (Springer International Publishing, 2015)

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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Jenis Koleksi : eBooks
No. Panggil : e20528418
Entri utama-Nama orang :
Entri tambahan-Nama orang :
Subjek :
Penerbitan : Switzerland: Springer International Publishing, 2015
Sumber Pengatalogan: LibUI eng rda
Tipe Konten: text
Tipe Media: computer
Tipe Pembawa: online resource
Deskripsi Fisik: xxvi, 519 pages : illustration
Tautan: https://link.springer.com/book/10.1007/978-3-662-44395-8
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e20528418 20-22-97625762 TERSEDIA
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