UI - Tesis Membership :: Kembali

UI - Tesis Membership :: Kembali

Laser scanning interface microscope

Hidayat Wiriadinata; Farid Ruskanda, supervisor; Batubara, John E., supervisor (Universitas Indonesia, 1992)

 Abstrak

A nonconductor optical technique, having lateral resolution of about 5 μm and vertical resolution of about 0.09 μm, for surface profile (roughness) measurement was studied. It based on a heterodyne interferometer in which two orthogonal polarized beams of slightly different frequencies were used in a modified interference microscope. The beams scanned the surface of a work piece, and the reflected beams were allowed to interfere with one another. The phase of the beat frequency of the interfering return beams is directly proportional to the surface height. The result of a surface measurement include graphical displays of surface profile, roughness (Ra), root mean square (rms) and peak to valley (P-V) value.

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 Metadata

Jenis Koleksi : UI - Tesis Membership
No. Panggil : T-Pdf
Entri utama-Nama orang :
Entri tambahan-Nama orang :
Entri tambahan-Nama badan :
Program Studi :
Subjek :
Penerbitan : Depok: Universitas Indonesia, 1992
Bahasa : eng
Sumber Pengatalogan : LibUI eng rda
Tipe Konten : text
Tipe Media : computer
Tipe Carrier : online resource
Deskripsi Fisik : ii, 31 pages : illustration ; 30 cm + appendix
Naskah Ringkas :
Lembaga Pemilik : Universitas Indonesia
Lokasi : Perpustakaan UI, Lantai 3
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No. Panggil No. Barkod Ketersediaan
T-Pdf 15-18-219802022 TERSEDIA
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Tidak ada ulasan pada koleksi ini: 81921
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