In this volume, the design, manufacture and control technology of precision machines are introduced to achieve the concrete requirements for precision engineering. The state-of-the-art of precision machining processes including precision turning, milling, grinding and lapping/polishing are discussed. The key components of precision machines are introduced as well, such as precision spindles, control systems, tools and grinding wheels etc. For design part, methods for the design and simulation of the general structure of precision machines as well as the key components are described in details. For manufacture part, fabrication and assembly technologies for different types of precision machines are introduced. For control part, control system, measurement and compensation technology for precision machines are discussed. The information provided in the book will be of interest to industrial practitioners and researchers in the field of precision machines and their control.