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"This book discusses the prevalent practices and enabling techniques in the assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics covered include the bonding and sealing of microcomponents, the process flow of MEMS and microsystem packaging, automated microassembly, and testing and design for testing."

"Control from MEMS to atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry."

"This work presents a unified approach to the vibrations of elastic systems as applied to MEMS devices, mechanical components, and civil structures.Applications include atomic force microscopes, energy harvesters, and carbon nanotubes and consider such complicating effects as squeeze film damping, viscous fluid loading, in-plane forces, and proof mass interactions with their elastic supports. These effects are analyzed as single degree-of-freedom models and as more realistic elastic structures. The governing equations and boundary conditions for beams, plates, and shells with interior and boundary attachments are derived by applying variational calculus to an expression describing the energy of the system. The advantages of this approach regarding the generation of orthogonal functions and the Rayleigh-Ritz method are demonstrated.A large number of graphs and tables are given to show the impact of various factors on the systems’ natural frequencies, mode shapes, and responses."

"This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. Included are chapters that:- Describe self/low-powered MEMS devices that are developed through biomimetic and bio-inspired approaches;- Review the recent progress in kinetic MEMS/NEMS-enabled energy harvesters as self-powered sensors;- Comprehensively review the ongoing research done in the field of nanofiber-based flexible and wearable energy harvesters;- Explore the current trends in the field of soft materials research and future challenges."

"Bolometers adalah termal inframerah sensor yang menyerap radiasi elektromagnetik sehingga meningkatkan suhu. Kenaikan suhu yang dihasilkan adalah kenaikan fungsi dari energi radiasi yang mendorong atau mengenai bolometer dan diukur berdasarkan resistansinya. Mikrobolometer dapat diartikan juga sebagai array dari sensor yang sangat sensitif dalam mendeteksi panas terhadap radiasi inframerah. Pada skripsi ini akan mensimulasikan satu pixel microbolometer dengan menggunakan program IntelliSuite. Mikrobolometer yang didisain akan digunakan sebagai alat inspeksi instalasi listrik, di dalam satu pixel mikrobolometer ini dilengkapi dengan thermistor NTC (Negative Temperature Coeficient), sedangkan rangkaian yang digunakan pada disain microbolometer ini yaitu rangkaian dengan menggunakan arus konstan.

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Bolometers are thermal infrared sensor that absorbs electromagnetic radiation thereby increasing the temperature. The resulting temperature increase is the increase in the function of the radiation energy that drives or the bolometer and the measured resistance. Microbolometer can be interpreted also as an array of sensors that are very sensitive in detecting the infrared heat radiation.

At this skripsi will simulate one pixel microbolometer using IntelliSuite program. Microbolometer which will be designed to be used as an electrical installation inspection, this microbolometer complete with a thermistor NTC (Negative Temperature coefficient),while the circuit used in the circuit design of this microbolometer using constant current."

"Sensor spektral molekuler merupakan sensor menggunakan kaidah elektroda bergerak (MEMS) sebagai elektroda pengukur kapasitansi dari bahanbahan diatasnya menggunakan konsep FEF). FEF adalah Fringing Electric Field. Dalam skripsi ini, dibuat rancang bangun sederhana dengan menghitung satu bagian elektroda bergerak tersebut. Contoh perhitungan dan contoh simulasi dari salah satu bagian terkecil elektroda bergerak sensor tersebut. Contoh perhitungan dan simulasi tersebut meliputi konstanta pegas (berat dari bandul (proofmass)) dan koefisien damping. Selanjutnya juga dihitung frekuensi resonansi mekanis dari elektroda tersebut.

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Molecular spectral sensor is a sensor electrode using a rule to move (MEMS) as the measuring electrode capacitance of the materials on it (using the concept of FEF). FEF is a fringing Electric Field. In this minithesis, simple design made by calculating a moving part of the electrode. Example of calculation and simulation example of one of the smallest electrode is moving sensors. Examples include the calculation and simulation of spring constant (the weight of the pendulum (proof mass)) and damping coefficient. Furthermore, it also calculated the mechanical resonance frequency of these electrodes."

"Sensor spektral molekuler merupakan sensor menggunakan kaidah elektroda bergerak (MEMS) sebagai elektroda pengukur kapasitansi dari bahan-bahan diatasnya (menggunakan konsep FEF). FEF adalah Fringing Electric Field. Dalam skripsi ini, dibuat rancang bangun sederhana dengan menghitung satu bagian elektroda bergerak tersebut. Contoh perhitungan dan contoh simulasi dari salah satu bagian terkecil elektroda bergerak sensor tersebut. Contoh perhitungan dan simulasi tersebut meliputi konstanta pegas (berat dari bandul (proofmass) dan damping coeffisient). Selanjutnya juga dihitung frekuensi resonansi mekanis dari elektroda tersebut.

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Molecular spectral sensor is a sensor electrode using a rule to move (MEMS)as the measuring electrode capacitance of the materials on it (usingthe concept of FEF).FEF is a fringing Electric Field.In this skripsi,simple design made by calculating a moving part of the electrode.Example of calculation and simulation example of one of the smallest electrode is moving sensors.Examples include the calculation and simulation of spring constant (theweightof the pendulum (proofmass)and damping coefficient).Furthermore, it also calculated the mechanical resonance frequency of these electrodes."

"Teknologi alat akuisi seismic sudah semakin berkembang. Pada penelitian sebelumnya sudah dilakukan penelitian mengenai alat akuisisi sinyal seismik berbasis sensor accelerometer MEMS. Sehingga pada penelitian ini telah memperbaharui alat akuisisi sinyal seismik dari sisi komunikasi agar dapat mengakuisisi lebih banyak geophone atau alat akuisisi sinyal seismik. Selain itu agar jangkauan kabel atau jarak antar geophone juga semakin panjang. Keluaran data dari sistem ini hamper setara dengan keluaran data dari geophone konvensinal. Sistem ini menggunakan Modul SPI Extender untuk membuat satu buah Raspberry Pi dapat mengakuisisi geophone MEMS dengan lebih banyak dan jengan jangakaun kabel yang lebih panjang. Hasil respon atau keluaran dari geophone disimpan kedalam Raspberry Pi terlebih dahulu untuk kemudian bisa diambil secara wireless oleh komputer host. Uji coba dilakukan di Universitas Indonesia.

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The technology of seismic acquisition instrumentation has getting developed. In previous research, a study of seismic signal acquisition instrumentation based on MEMS accelerometer sensor has been done. This research has renewed seismic signal accelerometer by communication aspect to acquire more geophones or seismic signal acquisition instrumentation. Output data of this system is almost same with output from conventional geophone. This system uses SPI Extender modul to make one Raspberry Pi to acquire more MEMS geophone and with further cable reach. Respond result or output of geophone is saved into Raspberry Pi first so that it can be taken wirelessly by host computer. Trial test is done at Universitas Indonesia."

"Kecendrungan menuju miniaturisasi terus meningkat beberapa tahun belakangan ini, seperti komponen alat-alat elektronika atau peralatan medis. Seiring dengan itu, tekonologi micro forming dituntut untuk mampu memproduksi secara presisi, cepat dan masal. Micro blanking merupakan salah satu proses fabrikasi yang efisien dan rendah biaya dibanding proses lain dalam skala mikro. Namun, size effect mempengaruhi hasil shear surface pada produk blank. Penelitian ini mengamati pengaruh kecepatan mulai 0.5 mm/s hingga 10 mm/s pada arah serat material sejajar dan tegak lurus menggunakan alumunium, tembaga, kuningan dan stainless steel SUS304. Hasil penelitian menunjukkan bahwa kecepatan punch yang semakin tinggi mampu memperbaiki kualitas shear surface.

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The trend towards miniaturization has steadily increased in recent years, such as electronic rsquo s components or medical equipment. Micro forming technology needs to be able to make precise, rapid and massive production. Micro blanking is one of the most efficient and low cost process compared to other micro scale processes. However, the size effect affects the shear surface quality on the blanked product.

This study observed the influence of the punch velocity from 0.5mm s to 10mm s in the parallel dan perpendicular rolling direction using aluminum, copper, brass and stainless steel SUS304. The results showed that higher punch velocity was able to improve the blank quality."