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"Boron liquid metal ion sources (LMIS) for focused ion beam system have been developed in the form of binary eutectic alloy of Pd73B27. This alloy source was selected as a p-type dopant source. A source life time of more than 120 h has been recorded with different emitter tip radii to test boron ion beam stability. Microstructure examination of the Pd73B27 binary alloy proved that boron LMIS instability was cause primarily by the formation of solid precipitates due to a change in alloy stoichiometry. Auger electron spectroscopy (AES) analysis of boron beam deposited on a flat silicon substrate shows rhenium emitter erosion as well as other elements (Fe, Ni and Cr) resulting from extractor sputtering. Greater attention was paid on the metallurgical aspect of LMIS to develop more reliable boron LMIS.

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Sumber ion metal cair boron untuk sistem berkas ion terpusat telah dibuat dengan menggunakan paduan biner "eutectic" Pd73B27- Sumber berkas ion dari paduan ini dipilih sebagai sumber dopan jenis p. Masa pakai paduan lebih dari 120 jam telah dicatat dengan percobaan menggunakan berbagai ukuran jari-jari emiter untuk mengukur kestabilan dari berkas ion yang berbasis boron. Penyelidikan terhadap struktur mikro dari paduan biner Pd73B27 membuktikan bahwa ketidak stabilan dari sumber ion metal cair berbasis boron disebabkan oleh pembentukan presipitat padatan. Pembentukan presipitat padatan ini akibat dari perubahan "stoichiometry". Analisa dengan menggunakan spektroskopi Auger dengan cara mendipositkan berkas ion ini pada permukaan lempeng silikon yang rata membuktikan bahwa terjadi erosi emiter yang terbuat dari rhenium dan juga elemen lain akibat dari pengaruh "sputtering" ekstraktor. Perhatian pada penelitian ini ditujukan pada aspek metalurgi dari sumber berkas ion metal cair untuk mengembangkan sumber ion metal cair boron yang dapat diandalkan."

"This book discusses the core principles and practical applications of a brand new machine category: liquid-metal soft machines and motors. After a brief introduction on the conventional soft robot and its allied materials, it presents the new conceptual liquid-metal machine, which revolutionizes existing rigid robots, both large and small. It outlines the typical features of the soft liquid-metal materials and describes the various transformation capabilities, mergence of separate metal droplets, self-rotation and planar locomotion of liquid-metal objects under external or internal mechanism. Further, it introduces a series of unusual phenomena discovered while developing the shape changeable smart soft machine and interprets the related mechanisms regarding the effects of the shape, size, voltage, orientation and geometries of the external fields to control the liquid-metal transformers. Moreover, the book illustrates typical strategies to construct a group of different advanced functional liquid-metal soft machines, since such machines or robots are hard to fabricate using rigid-metal or conventional materials. With highly significant fundamental and practical findings, this book is intended for researchers interested in establishing a general method for making future smart soft machine and accompanying robots."