Ditemukan 1 dokumen yang sesuai dengan query
Masruroh, author
The performance of a quartz crystal microbalance (QCM) biosensor can be enhanced by patterning the surface of the SiO2 substrate. In this study, the patterning was realized by a plasma etching process. The etching of the SiO2 was carried out using a tetrafluoroethane (CH2FCF3) plasma. The plasma was generated by...
Depok: Faculty of Engineering, Universitas Indonesia, 2017
UI-IJTECH 8:8 (2017)
Artikel Jurnal Universitas Indonesia Library
