Ditemukan 1 dokumen yang sesuai dengan query
Park, Jong-Hee, 1951- , author
This handbook provides guidelines and practical information on the chemical vapor deposition (CVD) process for surface engineering design, product development, and manufacturing. The first of the 14 chapters discuss the basic principles of CVD thermodynamics and kinetics, stresses and mechanical...
Materials Park, OH: ASM International, 2001
e20442202
eBooks Universitas Indonesia Library
