Aplikasi mikrokantilever sebagai biosensor mulai banyak dipelajari dalam duniakesehatan, biologi, kimia dan lingkungan hidup. Pada riset ini dilakukanperancangan biosensor dengan menggunakan piezoresistive mikrokantilever.Aktivitas riset meliputi pembuatan rangkaian wheatstone bridge sebagai detektorobyek, simulasi perubahan frekuensi resonansi berbasis Persamaan Euler-Bernoulli Beam sebagai deteksi keberadaan obyek, dan simulasi gerakmikrokantilever dengan menggunakan software COMSOL Multiphysics 3.5. Jenispiezoresistive mikrokantilever yang digunakan adalah seri NPX1CTP004 SIINanotechnology dengan panjang 110 µm, lebar 50 µm, dan tebal 1 µm. Massamikrokantilever adalah 12,815 nanogram (sudah termasuk massa receptor-nya).Contoh obyek yang dideteksi adalah bakteri, dimana massa untuk satu bakteridiasumsikan 0,3 picogram. Saat terdeteksi, satu massa obyek bakteri akanmenyebabkan nilai defleksi sebesar 3,05355x10-11 m dan nilai frekuensi resonansisebesar 118,90 kHz, sedangkan untuk empat obyek bakteri akan menyebabkannilai defleksi sebesar 3,05445x10-11 m dan nilai frekuensi resonansi sebesar118,68 kHz. Dari data tersebut terlihat bahwa bertambahnya massa bakteri akanmenyebabkan naiknya nilai defleksi dan turunnya nilai frekuensi resonansi. Abstract Diverse applications of microcantilevers in the field of sensors have been exploredby many researchers, such as in medicine, biological, chemistry, andenvironmental monitoring. This research designs a biosensor using piezoresistivemicrocantilever. The activities consist of designing Wheatstone bridge circuit asobject detector, simulation of resonance frequency shift based on Euler BernoulliBeam equation, and deflection simulation using COMSOL Multiphysics 3.5software program. The piezoresistive microcantilever type is NPX1CTP004 SIINanotechnology series with length 110 µm, 50 µm width, and thickness of 1 µm.Microcantilever mass is 12.815 nanograms (include the mass receptor). Thesample of object in this research is bacteria. One bacteria mass is assumed to 0.3picograms. When detected, the mass of one bacterium will cause deflection of3,05355x10-11 m and resonance frequency value of 118,90 kHz. Besides, for themass of four bacterium will cause deflection of 3,05445x10-11 m and resonancefrequency value of 118,68 kHz. From these data show that increasing the mass ofbacteria will increasing the deflection value and reducing the value of resonancefrequency.;Diverse applications of microcantilevers in the field of sensors have been exploredby many researchers, such as in medicine, biological, chemistry, andenvironmental monitoring. This research designs a biosensor using piezoresistivemicrocantilever. The activities consist of designing Wheatstone bridge circuit asobject detector, simulation of resonance frequency shift based on Euler BernoulliBeam equation, and deflection simulation using COMSOL Multiphysics 3.5software program. The piezoresistive microcantilever type is NPX1CTP004 SIINanotechnology series with length 110 µm, 50 µm width, and thickness of 1 µm.Microcantilever mass is 12.815 nanograms (include the mass receptor). Thesample of object in this research is bacteria. One bacteria mass is assumed to 0.3picograms. When detected, the mass of one bacterium will cause deflection of3,05355x10-11 m and resonance frequency value of 118,90 kHz. Besides, for themass of four bacterium will cause deflection of 3,05445x10-11 m and resonancefrequency value of 118,68 kHz. From these data show that increasing the mass ofbacteria will increasing the deflection value and reducing the value of resonancefrequency. |