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Band alignment of ultrathin GIZO/SiO2/Si heterostructure determined by electron spectroscopy

Dahlang Tahir, Sri Dewi Astuty Ilyas, Hee Jae Kang ([Direktorat Riset dan Pengabdian Masyarakat UI;Universitas Hasanuddin. Departemen Fisika;Universitas Hasanuddin. Departemen Fisika, Universitas Hasanuddin. Departemen Fisika], 2011)

 Abstrak

ABSTRACT
Amorphous GaInZnO (GIZO) thin films are grown on Si02/Si substrate by the RF magnetron sputtering method. By the combination of measured band gaps from reflection energy loss spectroscopy (REELS) spectra and valence band from X-ray photo-electron spectroscopy (XPS) spectra, we have demonstrated the energy band alignment of GIZO thin films. The band gap values are 3.2 eV, 3.2 eV, 3.4eV and 3.6eV for the concentration ratios of Ga: In: Zn in GIZO thin films are 1:1:1, 2:2:1, 3:2:1 and 4:2:1, respectively. These are attributed to the larger band gap energy of Ga2O3 compared with In 2O3 and ZnO. The valence band offsets (ΔEv) decrease from 2.18 to 1.68 eV with increasing amount of Ga in GIZO thin films for GIZO1 to GIZO4, respectively. These experimental values of band gap and valence band offset will provide the further understanding in the fundamental properties of GIZO/SiO2/Si heterostructure, which will be useful in the design, modeling and analysis of the performance devices applications.

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No. Panggil : J-Pdf
Entri utama-Nama orang :
Entri tambahan-Nama orang :
Subjek :
Penerbitan : [Place of publication not identified]: [Direktorat Riset dan Pengabdian Masyarakat UI;Universitas Hasanuddin. Departemen Fisika;Universitas Hasanuddin. Departemen Fisika, Universitas Hasanuddin. Departemen Fisika], 2011
Sumber Pengatalogan : LibUI eng rda
ISSN : 23391995
Majalah/Jurnal : Makara : Sains
Volume : Vol. 15, No. 2, November 2011: 193-196
Tipe Konten : text
Tipe Media : unmediated
Tipe Carrier : volume
Akses Elektronik : http://journal.ui.ac.id/index.php/science/article/view/1070/983
Institusi Pemilik : Universitas Indonesia
Lokasi : Direktorat Riset dan Pengabdian Masyarakat UI
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No. Panggil No. Barkod Ketersediaan
J-Pdf 03-19-249638899 TERSEDIA
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