[ABSTRAK Dewasa ini, pengembangan baterai sebagai bahan penyimpan energi yangtinggi, ringan, mampu pakai dalam jangka waktu yang lama, telah banyakdilakukan . Baterai berbasis ion lithium mampu menghasilkan energi yang besar,dan reservoir ion lithium pada baterai adalah elektroda. Pada penelitian inielektroda yang dikembangkan adalah partikel nano LiCoO2 ditambahkan 5, 10,15, 20 % v/v PVDF, sintesa partikel nano LiCoO2 dilakukan menggunakan teknikplanetary milling dan ultra sonic. Partikel nano LiCoO2 + x PVDF, dikarakterisasimenggunakan SEM-EDX, XRD, TEM, PSA dan analisa konduktifitas.Pembentukan lapisan tipis katoda, Pt/np-LiCoO2+xPVDF/Pt dilakukanmenggunakan metoda magnetron sputter deposition (MSD). Baterai mikroSi/Pt/LiCoO2/C6/Cu hasil pembentukan MSD dianalisa menggunakan metodeSEM-EDX, XRD, analisa konduktifitas, Four Probe Analyzer. Hasil penelitianmenunjukan bahwa, nano partikel LiCoO2 + 10 %v/v PVDF memilikikonduktifitas terbaik, memiliki struktur rhombohedral R-3m, dengan parameterkissi a = b = 2,8213 Å, c = 14,0446 Å. Lapisan tipis Pt/np-LiCoO2+10%v/vPVDF/Pt dibentuk menggunakan metoda MSD pada arus 20 Adengan tegangan 0,7 kV, ditumbuhkan pada substrat Si(111), dimana partikel np-LiCoO2+10%v/vPVDF membentuk morphologi ekuaksial. Perlakuan anil padatemperatur 600oC selama 1 jam pada lapisan tipis Pt/np-LiCoO2+10%v/vPVDF/Ptmenunjukan bahwa butir kristal np-LiCoO2+10%v/vPVDF tumbuh dengan padaorientasi [107]. Lapisan tipis np-LiCoO2+10%v/vPVDF pada sistem lapisanPt/np-LiCoO2+10%v/vPVDF/Pt, memiliki impendansi, kapasitansi dankonduktansi yang relatif baik. ABSTRAK Nowadays, battery as a high energy storage, which is lightweight andcapable of use in a long period of time, has been developed. Lithium ion battery iswell known, where lithium ion is capable to produce large energy and electrode isused as reservoir of lithium ions. In this study, nano particle of LiCoO2 addedwith 5, 10, 15, and 20% of PVDF have been developed. nano particle of LiCoO2was synthesized by using planetary milling and ultra sonic methods. Nano particleLiCoO2 + xPVDF was characterized by using SEM-EDX, XRD, TEM, PSA andconductivity analysis. The formation of micro battery was carried out by usingmagnetron sputter deposition (MSD) method. Micro battery ofSi/Pt/LiCoO2/C6/Cu resulted from MSD was analyzed by using SEM-EDX,XRD, conductivity analysis, and Four Probe Analyzer. The results showed thatnano particle of LiCoO2 + 10% v/v PVDF has the best conductivity, belong to thestructure of rhombohedral with space group R-3m, with lattice parameter a = b =2.8213 Å, c = 14.0446 Å. Thin film of Pt/np-LiCoO2+10%v/vPVDF/Pt systemhave been formed successfully at a current of 20 A and potential of 0.7 kV, onSi(111) substrate, where particle of np-LiCoO2+10%v/vPVDF formed an equaxialmorphology. Annealing of Pt/np-LiCoO2+10%v/vPVDF/Pt at 600oC for 1 hourresulted in the growth of np-LiCoO2+10%v/vPVDF crystal grain at orientation of[107]. Thin film of np-LiCoO2+10%v/vPVDF on the system of Pt/np-LiCoO2+10%v/vPVDF/Pt showed fairly good impedance, capacitance andconductivity., Nowadays, battery as a high energy storage, which is lightweight andcapable of use in a long period of time, has been developed. Lithium ion battery iswell known, where lithium ion is capable to produce large energy and electrode isused as reservoir of lithium ions. In this study, nano particle of LiCoO2 addedwith 5, 10, 15, and 20% of PVDF have been developed. nano particle of LiCoO2was synthesized by using planetary milling and ultra sonic methods. Nano particleLiCoO2 + xPVDF was characterized by using SEM-EDX, XRD, TEM, PSA andconductivity analysis. The formation of micro battery was carried out by usingmagnetron sputter deposition (MSD) method. Micro battery ofSi/Pt/LiCoO2/C6/Cu resulted from MSD was analyzed by using SEM-EDX,XRD, conductivity analysis, and Four Probe Analyzer. The results showed thatnano particle of LiCoO2 + 10% v/v PVDF has the best conductivity, belong to thestructure of rhombohedral with space group R-3m, with lattice parameter a = b =2.8213 Å, c = 14.0446 Å. Thin film of Pt/np-LiCoO2+10%v/vPVDF/Pt systemhave been formed successfully at a current of 20 A and potential of 0.7 kV, onSi(111) substrate, where particle of np-LiCoO2+10%v/vPVDF formed an equaxialmorphology. Annealing of Pt/np-LiCoO2+10%v/vPVDF/Pt at 600oC for 1 hourresulted in the growth of np-LiCoO2+10%v/vPVDF crystal grain at orientation of[107]. Thin film of np-LiCoO2+10%v/vPVDF on the system of Pt/np-LiCoO2+10%v/vPVDF/Pt showed fairly good impedance, capacitance andconductivity.] |