Nanofabrication : techniques and principles
edited by Maria Stepanova, Steven Dew (Springer, 2012)
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| The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years. |
 Nanofabrication.pdf :: Unduh
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| No. Panggil : | e20405946 |
| Entri tambahan-Nama orang : | |
| Subjek : | |
| Penerbitan : | Wien: Springer, 2012 |
| Sumber Pengatalogan: | LibUI eng rda |
| Tipe Konten: | text |
| Tipe Media: | computer |
| Tipe Pembawa: | online resource |
| Deskripsi Fisik: | |
| Tautan: | http://link.springer.com/book/10.1007%2F978-3-7091-0424-8 |
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| No. Panggil | No. Barkod | Ketersediaan |
|---|---|---|
| e20405946 | 02-19-130278820 | TERSEDIA |
| Ulasan: |
| Tidak ada ulasan pada koleksi ini: 20405946 |
