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Silicide technology for integrated circuits

edited by Lih J. Chen (Institution of Engineering and Technology, 2009)

 Abstrak

This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages. Other key topics covered are fundamentals, present and future silicide technology for Si-based devices, and characterisation methods.

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 Metadata

No. Panggil : e20452674
Entri tambahan-Nama orang :
Subjek :
Penerbitan : London: Institution of Engineering and Technology, 2009
Sumber Pengatalogan: LibUI eng rda
Tipe Konten: text
Tipe Media: computer
Tipe Pembawa: online resources
Deskripsi Fisik: xviii, 279 pages : illustration
Tautan: http://portal.igpublish.com/iglibrary/search/IETB0000093.main.html?8
Lembaga Pemilik:
Lokasi:
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No. Panggil No. Barkod Ketersediaan
e20452674 02-17-889370834 TERSEDIA
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