Full Description
| Responsibility Statement | edited by Maria J. Anc |
| Language Code | eng |
| Edition | |
| Collection Source | IG Publishing/IG Library |
| Cataloguing Source | LibUI eng rda |
| Content Type | text (rdacontent) |
| Media Type | computer (rdamedia) |
| Carrier Type | online resources (rdacarrier) |
| Physical Description | xvi, 143 pages : illustration |
| Link | http://portal.igpublish.com/iglibrary/search/IETB0000092.main.html?2 |
- Availability
- Digital Files: 1
- Review
- Cover
- Abstract
| Call Number | Barcode Number | Availability |
|---|---|---|
| e20452680 | 02-17-766879427 | TERSEDIA |
| No review available for this collection: 20452680 |
Abstract
Contents :
- Editor
- Authors
- Abbreviations
- Chapter 1: Introduction
- Chapter 2: Overview of SIMOX technology: historical perspective
- Chapter 3: Fundamental processes in SIMOX layer formation: ion
implantation and oxide growth
- Chapter 4: SIMOX/SOI processes: flexibility based on thermodynamic
considerations
- Chapter 5: Electrical and optical characterisation of SIMOX substrates
- Chapter 6: SIMOX material technology from R&D to advanced products
- Subject Index