Penelitian ini bertujuan untuk mensintesa dan mengoptimasi thick film BaFe12O19 fasa tunggal, thick film BaTiO3 fasa tunggal dan material multilayer BaTiO3/ BaFe12O19 dengan metode Sol-Gel/Spin Coating. Karakterisasi dilakukan untuk mengetahui sifat ferromagnetik dan ferroelektrik. Deposisi material multilayer dilakukan pada substrat single crystal Si (100) menggunakan spin coater. Thick film BaFe12O19 fasa tunggal berhasil disintesa dengan parameter optimum jumlah lapisan 9 lapis, kecepatan putaran 3000 rpm, temperature annealing 10000C selama 3 jam, dan rasio molar Ba: Fe = 1 : 8. Hasil karakterisasi SEM menunjukkan bahwa material multilayer BaFe12O19 memiliki distribusi ukuran dan bentuk partikel yang homogen, dengan ukuran partikel berkisar antara 100-150 nm dan tebal sekitar 2,9 µm. Hasil uji VSM pada material multilayer BaFe12O19 menunjukkan nilai koersivitas pada arah parallel dan perpendicular yang hampir sama yaitu 2,5 kOe. Thick film BaTiO3 fasa tunggal berhasil dideposisikan dengan kondisi proses optimum yaitu, temperatur annealing 8000C selama 4 jam dan kecepatan putaran 4000 rpm. Film BaTiO3 dengan jumlah lapisan 5 lapis mempunyai ketebalan 2,6-3,2 µm. Material multilayer BaTiO3/ BaFe12O19 berhasil dideposisikan pada substrat Si dengan metode sol-gel/spin coating serta menunjukkan sifat ferromagnetik dan ferroelektrik. Nilai magnetik Saturasi, Remanen, dan medan koersif pada material multilayer BaTiO3/ BaFe12O19 yaitu 2,7 memu, 1,3 memu dan 1,7 kOe. Sedangkan kurva histerisis elektrik menunjukkan nilai polarisasi spontan (Ps), polarisasi remanen (Pr) dan medan Coersive (Ec) berturut-turut 5,4 mC/cm2, 6,2 mC/cm2 dan 1 kV/cm.
In this research, single phase thick film BaFe12O19, BaTiO3 and BaTiO3/ BaFe12O19 multilayer had been synthesized by sol gel/spin coating method. Ferroelectric and ferromagnetic properties were observed. Multilayer materials was deposited on single crystal substrate Si (100) using a spin coater. Single phase thick film BaFe12O19 was synthesized with optimum parameters of 9 layers, 3000 rpm rotation speed, 10000C annealing temperature for 3 hours, and molar ratio Ba:Fe = 1: 8. The characteristic SEM images indicate that the multilayer BaFe12O19 material has a homogeneous size and shape distribution of particles, with crystallite size 100-150 nm. The magnetic hysteresis loops for single phase thick film BaFe12O19 showed that perpendicular and in-plane coercivity had the same value of 2,5 kOe. Single phase thick film BaTiO3 was successfully deposited with optimum process conditions which were annealing temperature at 8000C for 4 hours and rotation speed 4000 rpm. The BaTiO3 film with 5 layers has a thickness of 2.6-3.2 µm. BaTiO3/ BaFe12O19 multilayer material was successfully deposited on the Si substrate with the sol-gel/spin coating method and showed ferromagnetic and ferroelectric properties. The saturation magnetization (Ms), remanent magnetization (Mr), and coercivity of BaTiO3/ BaFe12O19 multilayer material are 2.7 memu, 1.3 memu and 1.7 kOe. From ferroelectric hysteresis loop it can be inferred that the values of remanent polarization (Pr), spontaneous polarization (Ps) and coercive field (Ec) are ,4 mC/cm2, 6.2 mC/cm2 and 1kV/cm, respectively. |
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