Micro and Nano Fabrication
Gatzen, Hans H;
Saile, Volker; Leuthold, Jürg
(Springer International Publishing, 2015)
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. |
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No. Panggil : | e20528418 |
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Penerbitan : | Switzerland: Springer International Publishing, 2015 |
Sumber Pengatalogan: | LibUI eng rda |
Tipe Konten: | text |
Tipe Media: | computer |
Tipe Pembawa: | online resource |
Deskripsi Fisik: | xxvi, 519 pages : illustration |
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No. Panggil | No. Barkod | Ketersediaan |
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e20528418 | 20-22-97625762 | TERSEDIA |
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Tidak ada ulasan pada koleksi ini: 20528418 |