Ditemukan 1 dokumen yang sesuai dengan query
Madou, Marc J., author
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the...
Boca Raton, FL: CRC Press, 2012
621.381 52 MAD f
Buku Teks Universitas Indonesia Library
