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Afshar, Amir, author

Boston: Butterworth-Heinemann, 1995

621.381 548 AFS p

Buku Teks  Universitas Indonesia Library

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Schroder, Dieter K., author

New York: John Wiley & Sons, 1998

621.381 SCH s

Buku Teks  Universitas Indonesia Library

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Bogdanowicz, Janusz, author

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops...

Berlin : Springer, 2012

e20424863

eBooks  Universitas Indonesia Library

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