Ditemukan 1 dokumen yang sesuai dengan query
Ronnie Higuchi Rusli, author
Boron liquid metal ion sources (LMIS) for focused ion beam system have been developed in the form of binary eutectic alloy of Pd73B27. This alloy source was selected as a p-type dopant source. A source life time of more than 120 h has been recorded with different emitter tip radii...
[place of publication not identified]: Jurnal Ilmu dan Rekayasa Material, 1999
JIRM-1-2-Agust1999-1
Artikel Jurnal Universitas Indonesia Library
