Dry etching for microelectronics
edited by Ronald A. Powell
North Holland Physics, 1984
Buku Teks
Millman, Jacob, author
Microelectronics
McGraw-Hill, 1987
Buku Teks
Microelectronics : analysis
Infotech, 1980
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Howe, Roger T., author
Microelectronics : an integrated approach
Prentice-Hall, 1997
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Roddy, Dennis, author
Introduction to microelectronics/ Dennis Roddy
Pergamon Press, 1978
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