VLSI technology
edited by S.M. Sze
McGraw-Hill, 1988
Buku Teks
Lindbeck, John R.
Manufacturing technology
Prentice-Hall, 1990
Buku Teks
Bond, W.L.
Crystal technology
John Wiley & Sons, 1976
Buku Teks
Roth, A.
Vacuum technology
North Holland, 1989
Buku Teks
ULSI technology
edited by C.Y. Chang and S.M. Sze
McGraw-Hill, 1996
Buku Teks