Ditemukan 1 dokumen yang sesuai dengan query
Gatzen, Hans H, author
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and...
Switzerland: Springer International Publishing, 2015
e20528418
eBooks Universitas Indonesia Library
