Ditemukan 1 dokumen yang sesuai dengan query
Hidayat Wiriadinata, author
A nonconductor optical technique, having lateral resolution of about 5 μm and vertical resolution of about 0.09 μm, for surface profile (roughness) measurement was studied. It based on a heterodyne interferometer in which two orthogonal polarized beams of slightly different frequencies were used in a modified interference microscope. The beams...
Depok: Universitas Indonesia, 1992
T-Pdf
UI - Tesis (Membership) Universitas Indonesia Library
