Ditemukan 1 dokumen yang sesuai dengan query
Eric Jobiliong, author
Indium tin oxide (ITO) films have been prepared by do magnetron sputtering with different partial oxygen pressure from 4 mPa to 32 mPa and different of sputter power. The thickness of ITO films were found to be 529 nm - 796 nm. The effects of oxygen partial pressure and sputtering...
Depok: Universitas Indonesia, 1999
T17289
UI - Tesis (Membership) Universitas Indonesia Library
