Ditemukan 4 dokumen yang sesuai dengan query
Gatzen, Hans H, author
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and...
Switzerland: Springer International Publishing, 2015
e20528418
eBooks Universitas Indonesia Library
This book features selected papers presented at Third International Conference on Nanoelectronics, Circuits and Communication Systems (NCCS 2017). Covering topics such as MEMS and nanoelectronics, wireless communications, optical communication, instrumentation, signal processing, Internet of Things, image processing, bioengineering, green energy, hybrid vehicles, environmental science, weather forecasting, cloud computing, renewable energy,...
Singapore: Springer Singapore, 2019
e20502219
eBooks Universitas Indonesia Library
The volume presents high quality papers presented at the Second International Conference on Microelectronics, Computing & Communication Systems (MCCS 2017). The book discusses recent trends in technology and advancement in MEMS and nanoelectronics, wireless communications, optical communication, instrumentation, signal processing, image processing, bioengineering, green energy, hybrid vehicles, environmental science, weather...
Singapore: Springer Singapore, 2019
e20502126
eBooks Universitas Indonesia Library
The book presents high-quality papers from the Third International Conference on Microelectronics, Computing & Communication Systems (MCCS 2018). It discusses the latest technological trends and advances in MEMS and nanoelectronics, wireless communications, optical communication, instrumentation, signal processing, image processing, bioengineering, green energy, hybrid vehicles, environmental science, weather forecasting, cloud computing,...
Singapore: Springer Fachmedien Wiesbaden, 2019
e20509923
eBooks Universitas Indonesia Library