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Hasil Pencarian

Ditemukan 2 dokumen yang sesuai dengan query
cover
Mack, Chris
Fundamental Principles of Optical Lithography : the science of microfabrication / Chris Mack
Chichester: John Wiley & Sons, 2007
621.381 531 MAC f
Buku Teks  Universitas Indonesia Library
cover
Elliott, David J., author
Microlithography : process technology for IC fabrication
New York: McGraw-Hill, 1986
621.381 73 ELL m
Buku Teks  Universitas Indonesia Library